Thin film transistor manufacture method

• Main Authors: Lee, Yu-Chou, Hsu, Yi-Tsai
• Format: Patent
• Language: English
• Published: 18.05.2004

This application claims the priority benefit of Taiwanese application serial no. 91111642, filed on May 31, 2002. A Thin Film Transistor (TFT) manufacture method, comprising manufacture of a gate, a gate isolation layer, a channel layer, and a source/drain. Wherein, the manufacture of the channel la...