Semiconductor integrated circuit device and method of manufacturing thereof

• Main Authors: Yoneya, Kazuhide, Koyanagi, Masaru
• Format: Patent
• Language: English
• Published: 16.12.2003

This application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 2000-305402, filed Oct. 4, 2000, the entire contents of which are incorporated herein by reference. A semiconductor integrated circuit device including an integrated circuit portion, a fu...