Bubbler

The present invention relates generally to a vapor generator for use in vapor deposition equipment. In particular, the present invention relates to a vapor generator designed for the requirements of vapor phase epitaxy and other chemical vapor deposition equipment. Disclosed are dual chambered bubbl...

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Main Authors Timmons, Michael L, Colby, Richard J, Stennick, Robert S
Format Patent
LanguageEnglish
Published 19.08.2003
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Abstract The present invention relates generally to a vapor generator for use in vapor deposition equipment. In particular, the present invention relates to a vapor generator designed for the requirements of vapor phase epitaxy and other chemical vapor deposition equipment. Disclosed are dual chambered bubbler designs for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems.
AbstractList The present invention relates generally to a vapor generator for use in vapor deposition equipment. In particular, the present invention relates to a vapor generator designed for the requirements of vapor phase epitaxy and other chemical vapor deposition equipment. Disclosed are dual chambered bubbler designs for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems.
Author Colby, Richard J
Stennick, Robert S
Timmons, Michael L
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References EMC.RE-CAD Generated Drawing; Bubbler, 2″ Solid Source Weldment; Drawing No. 1000624, Oct. 3, 1990.
EMC.RE-CAD Generated Drawing; Plate, Porous 2″ Solid Source Bubbler; Drawing No. 1000628, Sep. 24, 1990.
Yamane et al. (4916828) 19900400
(2223509) 19901100
EMC.RE-CAD Generated Drawing; VCR Gland Auto Weld, ¼″; Drawing No. 8335E01, Mar. 5, 1993.
Gartner et al. (4947790) 19900800
EMC.RE-CAD Generated Drawing; Cover Solid Source Bubbler; Drawing No. 1000627, Aug. 15, 1990.
EMC.RE-CAD Generated Drawing; VCR Male Nut ¼″; Drawing No. 1001356, Jun. 5, 1991.
Wen et al. (5553395) 19960900
EMC.RE-CAD Generated Drawing; VCR Male Nut 1/4″ ; Drawing No. 6344E01, Dec. 5, 1989.
EMC.RE-CAD Generated Drawing; Weldment Bubbler 2″ Liquid Source; Drawing No. 1001356, Jun. 5, 1991.
EMC.RE-CAD Generated Drawing; End Cap 2″ Liquid Source; Drawing No. 1001401, Jun. 5, 1991.
EMC.RE-CAD Generated Drawing; Valve, Manual, BN VESPEL ¼; Drawing No. 1001510, Aug. 19, 1991.
EMC.RE-CAD Generated Drawing; {fraction (1/4 )}Elbow ATW; Drawing No. 9107E01, Nov. 30, 1989.
EMC.RE-CAD Generated Drawing; Valve, Manual, Bn, VESPEL ¼; Drawing No. 1001510, Aug. 19, 1991.
Rangarajan et al. (6444038) 20020900
EMC.RE-CAD Generated Drawing; End Cap 2″ Solid Source; Drawing No. 1000626, Aug. 15, 1990.
Kirlin et al. (5711816) 19980100
EMC.RE-CAD Generated Drawing; Weldment Thermocouple Retainer; Drawing No. 1000630, Sep. 24, 1990.
EMC.RE-CAD Generated Drawing; Tube, 2″ Solid Source Bubbler; Drawing No. 1000625, Aug. 15, 1990.
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Snippet The present invention relates generally to a vapor generator for use in vapor deposition equipment. In particular, the present invention relates to a vapor...
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