Lithographic apparatus, device manufacturing method, and device manufactured thereby

1. Field of the Invention A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a...

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Main Authors Janssen, Eric W. A, Renkens, Marcel J. M, Vijfvinkel, Jakob, Schneider, Ronald M, Bisschops, Theo H. J, Tabor, Rob
Format Patent
LanguageEnglish
Published 22.07.2003
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Abstract 1. Field of the Invention A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.
AbstractList 1. Field of the Invention A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.
Author Bisschops, Theo H. J
Janssen, Eric W. A
Renkens, Marcel J. M
Tabor, Rob
Schneider, Ronald M
Vijfvinkel, Jakob
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References Young et al. (4818838) 19890400
Loopstra et al. (6226075) 20010500
(0973067) 20000100
Franken et al. (5150153) 19920900
Nelson (5523193) 19960600
Korenaga et al. (5467720) 19951100
Yamane et al. (5858587) 19990100
Hanzawa (5986743) 19991100
Hellriegel (4349244) 19820900
Mumola (5229872) 19930700
Abdelmalek (5337560) 19940800
(WO 96/38766) 19961200
Osanai (5376988) 19941200
Osanai et al. (5864389) 19990100
Loopstra et al. (6337484) 20020100
Van Der Werf et al. (6046792) 20000400
Bouwer et al. (5204712) 19930400
Vogt et al. (5296891) 19940300
Yabu (4907021) 19900300
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Snippet 1. Field of the Invention A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object...
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