Inductive plasma processor including current sensor for plasma excitation coil
The present invention relates generally to inductive plasma processors including an RF excitation coil and more particularly to such a processor including a shielded current sensor coupled to a low voltage portion of a branch including a winding of the coil. An inductive plasma processor includes an...
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| Main Authors | , , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
24.06.2003
|
| Online Access | Get full text |
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