Light modulation device and system
The present invention relates generally to optical devices and optical systems, and more particularly to a device for modulating a light beam intensity and a projector/exposure system using such a device. A light modulation element, device, and system is discussed. The light modulation element inclu...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
13.08.2002
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| Online Access | Get full text |
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| Summary: | The present invention relates generally to optical devices and optical systems, and more particularly to a device for modulating a light beam intensity and a projector/exposure system using such a device.
A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member. |
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