Evacuated package and a method of producing the same

1. Field of the Invention An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable package. A lid portion is joined onto a substrate with an element accommodated in an evacuated space formed by the substrate and the lid portion. A...

Full description

Saved in:
Bibliographic Details
Main Authors Hara, Tetsuzo, Negoro, Yasuhiro
Format Patent
LanguageEnglish
Published 09.07.2002
Online AccessGet full text

Cover

Loading…