Evacuated package and a method of producing the same
1. Field of the Invention An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable package. A lid portion is joined onto a substrate with an element accommodated in an evacuated space formed by the substrate and the lid portion. A...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
09.07.2002
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Online Access | Get full text |
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