Evacuated package and a method of producing the same

1. Field of the Invention An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable package. A lid portion is joined onto a substrate with an element accommodated in an evacuated space formed by the substrate and the lid portion. A...

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Main Authors Hara, Tetsuzo, Negoro, Yasuhiro
Format Patent
LanguageEnglish
Published 09.07.2002
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Abstract 1. Field of the Invention An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable package. A lid portion is joined onto a substrate with an element accommodated in an evacuated space formed by the substrate and the lid portion. A connecting hole in the lid portion extends from the space to the top face of the lid portion. A metal film is formed around the complete peripheral region of the opening of the connecting hole, and a thermo-melting material is joined to the metal film to close the opening of the connecting hole so as to seal the element in the evacuated space. Before closing the opening of the connecting hole with the thermo-melting material, the space is evacuated, and simultaneously, the thermo-melting material is melted by heat and left until completely degassed in a vacuum. The degassed thermo-melting material is then pressed and joined to the metal film around the periphery of the opening of the connecting hole to close the opening with the thermo-melting material and vacuum-seal the space.
AbstractList 1. Field of the Invention An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable package. A lid portion is joined onto a substrate with an element accommodated in an evacuated space formed by the substrate and the lid portion. A connecting hole in the lid portion extends from the space to the top face of the lid portion. A metal film is formed around the complete peripheral region of the opening of the connecting hole, and a thermo-melting material is joined to the metal film to close the opening of the connecting hole so as to seal the element in the evacuated space. Before closing the opening of the connecting hole with the thermo-melting material, the space is evacuated, and simultaneously, the thermo-melting material is melted by heat and left until completely degassed in a vacuum. The degassed thermo-melting material is then pressed and joined to the metal film around the periphery of the opening of the connecting hole to close the opening with the thermo-melting material and vacuum-seal the space.
Author Hara, Tetsuzo
Negoro, Yasuhiro
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References Tominaga et al. (4314225) 19820200
(57-93225) 19820600
West Abstract of JP 57-93225A; Mihashi et al.; Vacuum Sealing Method of Vacuum Container For Pressure Transducer, Jun. 10, 1982.
(372 108) 19880500
(WO 8707947) 19871200
Cho (5837562) 19981100
(WO 87/7947) 19871200
Satou (5335550) 19940800
Burns (5417115) 19950500
Hara (5498902) 19960300
Patent Abstracts of Japan, vol. 006, No. 175 (P-141), Sep. 9, 1982 & JP 57 093225 (Mitsubishi Electric Corp.), Jun. 10, 1982, abstract.
Piper (5533502) 19960700
Snyder (4861686) 19890800
Diedrich (4977748) 19901200
Merriam Webster's Collegiate Dictionary, 10th Edition, pp. 1117-1118, 1998.
Dell'Acqua (4966039) 19901000
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Snippet 1. Field of the Invention An evacuated package with highly reliable vacuum-sealing and a method for producing an evacuated package with the evacuatable...
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