Method for fabricating an array of ultra-small pores for chalcogenide memory cells

• Main Authors: Gonzalez, Fernando N. M, Turi, Raymond A
• Format: Patent
• Language: English
• Published: 21.05.2002

The present invention relates generally to semiconductor fabrication techniques and, more particularly, to a method for fabricating ultra-small pores for use in phase or state changeable memory devices such as, for example, chalcogenide memory cells. A method for fabricating an array of ultra-small...