Powerful glow discharge excilamp
The present invention relates generally to excimer lamps ("excilamp"), and particularly to high power, high efficiency excimer lamps. A powerful glow discharge lamp comprising two coaxial tubes, the outer tube being optically transparent, with a cathode and anode placed at opposite ends of...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
23.04.2002
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Online Access | Get full text |
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