Hydrostatic gas bearing
The present invention has its object to provide a hydrostatic gas bearing excellent in a vibration-damping characteristic. The hydrostatic gas bearing is provided with a gas ejecting equipments composed of a cylindrical fine hole having a diameter of not less than 0.04 mm and not more than 0.4 mm,wh...
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
22.01.2004
|
| Online Access | Get full text |
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| Summary: | The present invention has its object to provide a hydrostatic gas bearing excellent in a vibration-damping characteristic. The hydrostatic gas bearing is provided with a gas ejecting equipments composed of a cylindrical fine hole having a diameter of not less than 0.04 mm and not more than 0.4 mm,wherein a helium gas is ejected through the cylindrical fine hole. The cylindrical hole has a diameter D and a length L, and in the case where a relationship of D
4
/L is not more than 2×10
−4
mm
3
is established, the hydrostatic gas bearing excellent in the vibration-damping characteristic is specifically realized. |
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