Resist pattern and method of forming same, method of forming thin-film pattern, and method of manufacturing micro device

• Main Author: Kamijima, Akifumi
• Format: Patent
• Language: English
• Published: 02.08.2001

A resist pattern includes: an upper layer pattern made of a resist; and a lower layer pattern made of a material being soluble in a developer used for forming the upper layer pattern. The upper layer pattern extends over a portion corresponding to a thin-film pattern to be formed and other portions...