Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterningElectronic supplementary information (ESI) available. See DOI: 10.1039/c8nr09174a

• Main Authors: Reeves, Jeremy B, Jayne, Rachael K, Barrett, Lawrence, White, Alice E, Bishop, David J
• Format: Journal Article
• Language: English
• Published: 14.02.2019

The construction of a complex, 3D optical metamaterial challenges conventional nanofabrication techniques. These metamaterials require patterning of both a deformable mechanical substrate and an optically-active structure with ∼200 nm resolution and precision. The soft nature of the deformable mecha...