Fabrication of Stacked NbN/TiN(x)/NbN Josephson Junctions Using an Inductively Coupled Plasma Etching Technique

• Published in: IEEE transactions on applied superconductivity Vol. 17; no. 2; pp. 210 - 213
• Main Authors: Shoji, A, Koda, N, Yamamori, H
• Format: Journal Article
• Language: English
• Published: 01.06.2007

Vertical stacks of up to five NbN/TiN(x)/NbN junctions were fabricated using an inductively coupled plasma etching technique. The spread in critical currents at junctions in the fabricated stacks was measured as a function of the number [abstract truncated by publisher].