Fabrication of Stacked NbN/TiN(x)/NbN Josephson Junctions Using an Inductively Coupled Plasma Etching Technique
Vertical stacks of up to five NbN/TiN(x)/NbN junctions were fabricated using an inductively coupled plasma etching technique. The spread in critical currents at junctions in the fabricated stacks was measured as a function of the number [abstract truncated by publisher].
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| Published in | IEEE transactions on applied superconductivity Vol. 17; no. 2; pp. 210 - 213 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
01.06.2007
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| Online Access | Get full text |
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| Summary: | Vertical stacks of up to five NbN/TiN(x)/NbN junctions were fabricated using an inductively coupled plasma etching technique. The spread in critical currents at junctions in the fabricated stacks was measured as a function of the number [abstract truncated by publisher]. |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-1 |
| ISSN: | 1051-8223 |
| DOI: | 10.1109/TASC.2007.897715 |