Preparation of pulsed DC magnetron deposited Fe-doped SnO sub(2) coatings

• Published in: Physica status solidi. A, Applications and materials science Vol. 213; no. 9; pp. 2303 - 2309
• Main Authors: Kormunda, Martin, Fischer, Daniel, Hertwig, Andreas, Beck, Uwe, Sebik, Matej, Esser, Norbert
• Format: Journal Article
• Language: English
• Published: 01.09.2016
• Subjects: Coatings; Constants; Deposition; Gas mixtures; Iron; Magnetron sputtering; Oxygen; Tin dioxide

Iron-doped SnO sub(2) coatings were deposited in a 50kHz DC-pulsed magnetron sputtering discharge. The pulses had a duration of 4 mu s in selected gas mixtures from pure argon up to 60% of oxygen at a constant total pressure of 0.2Pa. A single target of SnO sub(2) with Fe inset was used. The mass sp...