High quality epitaxial piezoelectric and ferroelectric wurtzite Al\(_{1-x}\)Sc\(_x\)N thin films

• Published in: arXiv.org
• Main Authors: Zeng, Yang, Yihan Lei, Wang, Yanghe, Cheng, Mingqiang, Liao, Luocheng, Wang, Xuyang, Ge, Jinxin, Liu, Zhenghao, Ming, Wenjie, Li, Chao, Xie, Shuhong, Li, Jiangyu, Li, Changjian
• Format: Paper
• Language: English
• Published: Ithaca Cornell University Library, arXiv.org 21.08.2024
• Subjects: Ferroelectric materials; Ferroelectricity; Leakage current; Piezoelectricity; Pulsed laser deposition; Pulsed lasers; Radio frequency; Sapphire; Scandium; Silicon substrates; Thin films; Wurtzite

Piezoelectric and ferroelectric wurtzite are promising to reshape modern microelectronics because they can be easily integrated with mainstream semiconductor technology. Sc doped AlN (Al\(_{1-x}\)Sc\(_x\)N) has attracted much attention for its enhanced piezoelectric and emerging ferroelectric proper...