Mechanism of biaxial alignment of oxide thin films during ion-beam-assisted depostition

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Published inJournal of the American Ceramic Society Vol. 80; no. 10; p. 2637
Main Authors Ressler, Kevin G, Sonnenberg, Neville, Cima, Michael J
Format Journal Article
LanguageEnglish
Published Columbus Wiley Subscription Services, Inc 01.10.1997
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Author Cima, Michael J
Ressler, Kevin G
Sonnenberg, Neville
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Title Mechanism of biaxial alignment of oxide thin films during ion-beam-assisted depostition
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