Design and fabrication of a piezoelectric MEMS xylophone transducer with a flexible electrical connection

• Published in: Sensors and actuators. A. Physical. Vol. 275; p. 219
• Main Authors: Zhao, Chuming, Knisely, Katherine E, Grosh, Karl
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier BV 01.06.2018
• Subjects: Acoustics; Cantilever beams; Cochlear implants; Electric wire; Finite element analysis; Finite element method; Frequency response; In vivo methods and tests; Microelectromechanical systems; Piezoelectricity; Polymers; Surgical implants; Transducers; Underwater; Viscous fluids

We develop a method for the design and fabrication of a miniaturized multichannel piezoelectric xylophone acoustic transducer with an integrated flexible ribbon cable for electrical connectivity. This transducer works in air or underwater and it is designed to be implantable for in vivo animal testi...