Extraction of elastic-plastic material properties of thin films through nanoindentaion technique with support of numerical methods : THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS (EUROSIME 2010)
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| Published in | Microelectronics and reliability Vol. 51; no. 6; pp. 1046 - 1053 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Kidlington
Elsevier
2011
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| Subjects | |
| Online Access | Get full text |
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| Author | JANUS, Paweł EKWINSKA, Magdalena DOWHAN, Łukasz WITTLER, Olaf WYMYSŁOWSKI, Artur |
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| Author_xml | – sequence: 1 givenname: Łukasz surname: DOWHAN fullname: DOWHAN, Łukasz organization: Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Wroclaw, Poland – sequence: 2 givenname: Artur surname: WYMYSŁOWSKI fullname: WYMYSŁOWSKI, Artur organization: Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Wroclaw, Poland – sequence: 3 givenname: Paweł surname: JANUS fullname: JANUS, Paweł organization: Institute of Electron Technology, Warsaw, Poland – sequence: 4 givenname: Magdalena surname: EKWINSKA fullname: EKWINSKA, Magdalena organization: Institute of Electron Technology, Warsaw, Poland – sequence: 5 givenname: Olaf surname: WITTLER fullname: WITTLER, Olaf organization: Fraunhofer Institute IZM, Micro Materials Center, Berlin, Germany |
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| Issue | 6 |
| Keywords | Nanoindentation Mechanical properties Numerical method Microelectronics Algorithm Optimization Thin film Finite element method Plastic material Test method Properties of materials Measurement method Plastics |
| Language | English |
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| Title | Extraction of elastic-plastic material properties of thin films through nanoindentaion technique with support of numerical methods : THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS (EUROSIME 2010) |
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