Extraction of elastic-plastic material properties of thin films through nanoindentaion technique with support of numerical methods : THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS (EUROSIME 2010)

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Bibliographic Details
Published inMicroelectronics and reliability Vol. 51; no. 6; pp. 1046 - 1053
Main Authors DOWHAN, Łukasz, WYMYSŁOWSKI, Artur, JANUS, Paweł, EKWINSKA, Magdalena, WITTLER, Olaf
Format Journal Article
LanguageEnglish
Published Kidlington Elsevier 2011
Subjects
Applied sciences
Electronics
Exact sciences and technology
Materials
Nanoindentation
Mechanical properties
Numerical method
Microelectronics
Algorithm
Optimization
Thin film
Finite element method
Plastic material
Test method
Properties of materials
Measurement method
Plastics
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ISSN:0026-2714
1872-941X