EUV sources using Xe and Sn discharge plasmas : Special cluster on extreme ultraviolet light sources for semiconductor manufacturing

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 37; no. 23; pp. 3254 - 3265
Main Authors BORISOV, Vladimir M, ELTSOV, Aleksander V, IVANOV, Aleksander S, KIRYUKHIN, Yuriy B, KHRISTOFOROV, Oleg B, MISHCHENKO, Valentin A, PROKOFIEV, Aleksander V, VINOKHODOV, Aleksander Yu, VODCHITS, Vladimir A
Format Journal Article
LanguageRussian
Published Bristol Institute of Physics 2004
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ISSN:0022-3727
1361-6463