Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

• Published in: Sensors (Basel, Switzerland) Vol. 19; no. 14
• Main Authors: Barauskas, Dovydas, Pelenis, Donatas, Vanagas, Gailius, Viržonis, Darius, Baltrušaitis, Jonas
• Format: Journal Article
• Language: English
• Published: United States MDPI AG 01.07.2019
• Subjects: Chemistry; Engineering; Instruments & Instrumentation

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collect...