원자층 증착법에 의한 Al₂O₃ 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향

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Published inBiuletyn Uniejowski Vol. 48; no. 2; pp. 50 - 55
Main Authors 윤은영(Eun Young Yun), 이우재(Woo-Jae Lee), 장경수(Kyung Su Jang), 최현진(Hyun-Jin Choi), 최우창(Woo-Chang Choi), 권세훈(Se Hun Kwon)
Format Journal Article
LanguageKorean
Published 한국표면공학회 2015
Subjects
Moth eye structure
Al₂O₃ thin films
Atomic layer deposition
Mechanical properties
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Author 최현진(Hyun-Jin Choi)
이우재(Woo-Jae Lee)
장경수(Kyung Su Jang)
최우창(Woo-Chang Choi)
윤은영(Eun Young Yun)
권세훈(Se Hun Kwon)
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  fullname: 최우창(Woo-Chang Choi)
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  fullname: 권세훈(Se Hun Kwon)
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DocumentTitle_FL Effect of Atomic Layer Deposited Al₂O₃ Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films
EISSN 2299-8403
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Keywords Moth eye structure
Al₂O₃ thin films
Atomic layer deposition
Mechanical properties
Language Korean
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StartPage 50
Title 원자층 증착법에 의한 Al₂O₃ 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향
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