H 2 S Micro Gas Sensor Based on a SnO 2 -CuO Multi-layer Thin Film

• Published in: Transactions on electrical and electronic materials Vol. 13; no. 1; pp. 27 - 30
• Main Authors: Kim, Sung-Eun, Choi, Woo-Chang
• Format: Journal Article
• Language: Korean
• Published: 2012
• Subjects: Multi-layer; H_2S; Gas sensor; SnO_2$-CuO; MEMS

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperat...