OPTICAL PROPERTIES OF INDIUM OXIDE AND INDIUM TIN OXIDE FILMS PREP ARED BY SPUTTERING

• Published in: 한국표면공학회지 Vol. 29; no. 6; pp. 660 - 665
• Main Authors: Fujita, Yasuhiko, Kitakizaki, Kaoru
• Format: Journal Article
• Language: Korean
• Published: 1996

Thin films of indium oxide and indium tin oxide have been prepared by d.c. magnetron sputtering onto the fused silica substrates kept at 90, 200 and $300^{\circ}C$. In order to elucidate the optical absorption process in low energy region below 3 eV, we have analyzed the absorption coefficients obta...