Fabrication and Analysis of Thin Film Lithum Niobate Resonators for 5GHz Frequency and Large Kt2 Applications

• Published in: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 967 - 969
• Main Authors: Yandrapalli, Soumya, Kucuk, Seniz Esra, Atakan, Baris, Plessky, Victor, Villanueva, Luis Guillermo
• Format: Conference Proceeding
• Language: English
• Published: IEEE 25.01.2021
• Subjects: 5G application; 5GHz; A1 mode; bulk acoustic resonator; electromechanical coupling; Fabrication; Frequency measurement; k t 2 . RF MEMS; Lamb wave; large bandwidth; Lithium niobate; Micromechanical devices; Resonant frequency; Resonator filters; Resonators; thin films

This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k t 2 of 28% resonators at 5GHz, making them suitable for high frequency and large bandwidth 5G filter appl...