Electro-thermal characterization of a differential temperature sensor and the thermal coupling in a 65nm CMOS IC

This paper explains the design decisions and the different measurements we have done in order to characterize the thermal coupling and the characteristics of temperature sensors embedded in a integrated circuit implemented in a CMOS 65nm technology. The circuit contains a 2GHz linear power amplifier...

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Published in18th International Workshop on THERMal INvestigation of ICs and Systems pp. 1 - 6
Main Authors Altet, J., Gonzalez, J. L., Gomez, D., Perpina, X., Grauby, S., Dufis, C., Vellvehi, M., Mateo, D., Dilhaire, S., Jorda, X.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2012
Subjects
Frequency measurement
Heating
Sensitivity
Temperature measurement
Temperature sensors
Transducers
Voltage measurement
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Abstract This paper explains the design decisions and the different measurements we have done in order to characterize the thermal coupling and the characteristics of temperature sensors embedded in a integrated circuit implemented in a CMOS 65nm technology. The circuit contains a 2GHz linear power amplifier, MOS transistors behaving as heat sources and two differential temperature sensors. Temperature measurements performed with the embedded sensor are corroborated with an Infra-Red camera and a laser interferometer used as thermometer.
AbstractList This paper explains the design decisions and the different measurements we have done in order to characterize the thermal coupling and the characteristics of temperature sensors embedded in a integrated circuit implemented in a CMOS 65nm technology. The circuit contains a 2GHz linear power amplifier, MOS transistors behaving as heat sources and two differential temperature sensors. Temperature measurements performed with the embedded sensor are corroborated with an Infra-Red camera and a laser interferometer used as thermometer.
Author Gomez, D.
Altet, J.
Vellvehi, M.
Gonzalez, J. L.
Jorda, X.
Dufis, C.
Dilhaire, S.
Mateo, D.
Perpina, X.
Grauby, S.
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SubjectTerms Frequency measurement
Heating
Sensitivity
Temperature measurement
Temperature sensors
Transducers
Voltage measurement
Title Electro-thermal characterization of a differential temperature sensor and the thermal coupling in a 65nm CMOS IC
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