A trial scanning atom probe and field distribution at a tip apex of a micro-tip array

• Published in: 9th International Vacuum Microelectronics Conference p. 668
• Main Authors: Nishikawa, O., Numada, Y., Iwatsuki, M., Aoki, S., Ishikawa, Y.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 1996
• Subjects: Atomic measurements; Cryogenics; Electrodes; Joining processes; Microscopy; Probes; Refrigeration; Silver; Temperature; Tunneling

Summary form only given, as follows. A trial scanning atom probe (SAP) was constructed by modifying a low temperature UHV scanning tunneling microscope (STM). The specimen holder of the conventional STM was replaced with a holder of an extraction electrode made of a 10 micrometer thick Pt foil. The...