Nanoindentation experiments with small tip radii: an experimental method

• Published in: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP) pp. 225 - 230
• Main Authors: Martegoutte, Julien, Seguineau, Cedric, Malhaire, Christophe, Fourcade, Thibaut, Desmarres, Jean-Michel, Lafontan, Xavier, Francis, Pressecq
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.05.2010
• Subjects: Aluminum; Coatings; Copper; Discrete cosine transforms; Geometry; Materials testing; Mechanical factors; Performance evaluation; Surface fitting; Topology

Nanoindentation experiments were performed with spherical tip radii on one ceramic and three metals. The resulting Young's modulus appears to be lower than expected values. The method and analytical approach are then discussed. In particular, the shape of the indenter, the contact between the t...