Effect of mechanical properties variation of polysilicon on microcantilever mass sensor sensitivity - Maroufi, M; Zihajehzadeh, S; Shamshirsaz, M; Rezaie, A H (2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2010)
Keywords: Biomarkers; Biosensors; Humans; Mechanical factors; Mechanical sensors; Microsensors; Resonance; Temperature sensors; Uncertainty; Young's modulus