APA (7th ed.) Citation

Maroufi, M., Zihajehzadeh, S., Shamshirsaz, M., & Rezaie, A. H. (2010, May). Effect of mechanical properties variation of polysilicon on microcantilever mass sensor sensitivity. 2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 144-147.

Chicago Style (17th ed.) Citation

Maroufi, M., S. Zihajehzadeh, M. Shamshirsaz, and A H. Rezaie. "Effect of Mechanical Properties Variation of Polysilicon on Microcantilever Mass Sensor Sensitivity." 2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS May. 2010: 144-147.

MLA (9th ed.) Citation

Maroufi, M., et al. "Effect of Mechanical Properties Variation of Polysilicon on Microcantilever Mass Sensor Sensitivity." 2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, May. 2010, pp. 144-147.