The investigation of local piezoelectric properties of piezoelectric transducers by acoustic microscopy

Local piezoelectric properties of film and plate piezoelectric transducers have been studied by transmission acoustic microscopy methods at a frequency of 450 MHz with a resolution of 3 mu m. One-dimensional profiles and gray-scale acoustic images of the microstructure have been obtained. It is conc...

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Bibliographic Details
Published inIEEE 1988 Ultrasonics Symposium Proceedings pp. 775 - 777 vol.2
Main Authors Mayev, R.G., Kolosov, O.V., Atayev, K.A., Levin, V.M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1988
Subjects
Acoustic transducers
Electrodes
Focusing
Frequency
Lenses
Microscopy
Piezoelectric transducers
Surface acoustic waves
Ultrasonic transducers
Voltage
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Summary:Local piezoelectric properties of film and plate piezoelectric transducers have been studied by transmission acoustic microscopy methods at a frequency of 450 MHz with a resolution of 3 mu m. One-dimensional profiles and gray-scale acoustic images of the microstructure have been obtained. It is concluded that acoustic microscopy can be used effectively for the investigation of the nonmechanical characteristics of piezoelectric transducer specimens.< >
DOI:10.1109/ULTSYM.1988.49483