Optimization of 2.14 um/sup 2/ 6T-SRAM cell by using cell-like test structures

• Published in: Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516) pp. 211 - 215
• Main Authors: Hsieh, S., Tsui, R.F., Lin, W., Liaw, J.J., Doong, K.Y., Wu, C.-M.M.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2004
• Subjects: Circuits; Contacts; Costs; Dielectric measurements; Electric variables measurement; Kelvin; Logic testing; Random access memory; Routing; Variable structure systems

This work is aimed at describing the optimization of a shrunk version of an embedded 6T-SRAM-cell process and the evaluation of yield impact by using cell-like test structures. The various test structures are designed to narrow down the cell characteristics and the electrical performance. These test...