Noninvasive Flow Bubble Detection for Small Pipes Based on Piezoelectric Micromachined Ultrasonic Transducers

• Published in: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) pp. 1 - 4
• Main Authors: Li, Zixuan, Yuan, Jiawei, Ma, Qi, Qin, Shaohui, Yuan, Zheng, Zhao, Yihe, Wang, Tong, Wang, Xiaozhang, Li, Zhikang, Zhao, Libo
• Format: Conference Proceeding
• Language: English
• Published: IEEE 02.05.2024
• Subjects: Acoustic measurements; Flow bubble; MEMS; PMUTs; Semiconductor device measurement; Small pipes; Temperature measurement; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement; Voltage measurement

Ultrasonic flow bubble detection plays a significant role in industrial control and chemical production, as it enables noninvasive monitoring of hydraulic systems, oil degradation, and the progression of chemical reactions. However, the conventional bulk PZT ultrasonic transducers currently employed...