Special issue on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP 2015) Montpellier, France, April 27–30, 2015
The 2015 edition of the Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP) was held in Montpellier, France, 27–30 April 2015. Established in 1999 by our colleague Dr Bernard Courtois, DTIP is definitively the premier MEMS scientific event in Europe. DTIP’2015 was the 17th...
Saved in:
Published in | Microsystem Technologies Vol. 23; no. 9 |
---|---|
Main Author | |
Format | Conference Proceeding |
Language | English |
Published |
Springer Verlag
01.09.2017
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The 2015 edition of the Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP) was held in Montpellier, France, 27–30 April 2015. Established in 1999 by our colleague Dr Bernard Courtois, DTIP is definitively the premier MEMS scientific event in Europe. DTIP’2015 was the 17th edition and has been extremely appreciated by an hundred of attendees for the quality of both scientific and social programs. Oral and poster presentations were carefully selected by the Program Committee to insure a high scientific level and awesome plenary speakers have been invited. This Symposium brought together participants interested in manufacturing of microstructures and participants interested in design tools to facilitate the design of these microstructures.This special issue is composed of 20 extended versions of the best papers presented at the Symposium. Extended papers have been refereed, along the usual refereeing process in force at Microsystem Technologies. Selected papers cover a broad range of topics including compact thermal modelling, thermal testing, electrostatic and thermal actuation, simulation, accelerometers, electronic front-end for sensors, magnetic nanoparticles and materials, RF MEMS, Quantum dots, piezoelectric films, Micro-transducers, magnetometers, microfluidic devices, resonant sensors, micro-fabrication, wafer bonding, Packaging, flexible interconnects and MEMS reliability.We hope that you will enjoy these contributions as much as we did and if you want to join the DTIP community do not hesitate to attend our next event or to visit our website. |
---|---|
AbstractList | The 2015 edition of the Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP) was held in Montpellier, France, 27–30 April 2015. Established in 1999 by our colleague Dr Bernard Courtois, DTIP is definitively the premier MEMS scientific event in Europe. DTIP’2015 was the 17th edition and has been extremely appreciated by an hundred of attendees for the quality of both scientific and social programs. Oral and poster presentations were carefully selected by the Program Committee to insure a high scientific level and awesome plenary speakers have been invited. This Symposium brought together participants interested in manufacturing of microstructures and participants interested in design tools to facilitate the design of these microstructures.This special issue is composed of 20 extended versions of the best papers presented at the Symposium. Extended papers have been refereed, along the usual refereeing process in force at Microsystem Technologies. Selected papers cover a broad range of topics including compact thermal modelling, thermal testing, electrostatic and thermal actuation, simulation, accelerometers, electronic front-end for sensors, magnetic nanoparticles and materials, RF MEMS, Quantum dots, piezoelectric films, Micro-transducers, magnetometers, microfluidic devices, resonant sensors, micro-fabrication, wafer bonding, Packaging, flexible interconnects and MEMS reliability.We hope that you will enjoy these contributions as much as we did and if you want to join the DTIP community do not hesitate to attend our next event or to visit our website. |
Author | Michel, Bernd |
Author_xml | – sequence: 1 givenname: Bernd surname: Michel fullname: Michel, Bernd organization: Fraunhofer Institute for Electronic Nano Systems |
BackLink | https://hal-lirmm.ccsd.cnrs.fr/lirmm-01768858$$DView record in HAL |
BookMark | eNqVjstKw0AUhg_SgunlAdydpWJHz2RyXYqttGCw0NDtcKjTOJpMSiYKvr1RfIGu_p__At8ERq51BuBK0p0kSu89URyFgmQqVEy5UBcQyEiFQmZxNoKA8igRKaXJJUy8f6fhk2cqgP3uZA6Wa7TefxpsHS6Nt5VbYGl8v8CN603VcW-Hht0rbvnwwZV1FbZHLFbF7i8tXn7d9bLcbDEkGd_MYHzk2pv5v07h9mlVPq7FG9f61NmGu2_dstXrh2dd265p9ICeZAPsl1TnrX8AYY5LMQ |
ContentType | Conference Proceeding |
Copyright | Distributed under a Creative Commons Attribution 4.0 International License |
Copyright_xml | – notice: Distributed under a Creative Commons Attribution 4.0 International License |
DBID | 1XC |
DOI | 10.1007/s00542-017-3509-3 |
DatabaseName | Hyper Article en Ligne (HAL) |
DatabaseTitleList | |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering |
EISSN | 1432-1858 |
Editor | Nouet, Pascal |
Editor_xml | – sequence: 1 givenname: Pascal orcidid: 0000-0003-2137-2623 surname: Nouet fullname: Nouet, Pascal |
ExternalDocumentID | oai_HAL_lirmm_01768858v1 |
GroupedDBID | -5B -5G -BR -EM -Y2 -~C .86 .DC .VR 06D 0R~ 0VY 123 199 1N0 1SB 1XC 203 28- 29M 29~ 2J2 2JN 2JY 2KG 2KM 2LR 2P1 2VQ 2~H 30V 4.4 406 408 409 40D 40E 5QI 5VS 67Z 6NX 78A 8TC 8UJ 95- 95. 95~ 96X AAAVM AABHQ AACDK AAEOY AAHNG AAIAL AAJBT AAJKR AANZL AARHV AARTL AASML AATNV AATVU AAUYE AAWCG AAYIU AAYQN AAYTO AAYZH ABAKF ABBBX ABBXA ABDZT ABECU ABFTD ABFTV ABHLI ABHQN ABJCF ABJNI ABJOX ABKCH ABKTR ABMNI ABMQK ABNWP ABQBU ABSXP ABTEG ABTHY ABTKH ABTMW ABULA ABWNU ABXPI ACAOD ACBXY ACDTI ACGFS ACHSB ACHXU ACIPQ ACKNC ACMDZ ACMLO ACOKC ACOMO ACSNA ACZOJ ADHHG ADHIR ADIMF ADINQ ADKNI ADKPE ADRFC ADTPH ADURQ ADYFF ADZKW AEBTG AEFIE AEFQL AEGAL AEGNC AEJHL AEJRE AEKMD AEMSY AEOHA AEPYU AESKC AETLH AEVLU AEXYK AFEXP AFGCZ AFKRA AFLOW AFQWF AFWTZ AFZKB AGAYW AGDGC AGGDS AGJBK AGMZJ AGQEE AGQMX AGRTI AGWIL AGWZB AGYKE AHAVH AHBYD AHKAY AHSBF AHYZX AIAKS AIGIU AIIXL AILAN AITGF AJBLW AJRNO AJZVZ ALMA_UNASSIGNED_HOLDINGS ALWAN AMKLP AMXSW AMYLF AMYQR AOCGG ARAPS ARCEE ARMRJ ASPBG AVWKF AXYYD AYJHY AZFZN B-. BA0 BBWZM BDATZ BENPR BGLVJ BGNMA CAG CCPQU COF CS3 CSCUP DDRTE DL5 DNIVK DPUIP EBLON EBS EIOEI EJD ESBYG FEDTE FERAY FFXSO FIGPU FINBP FNLPD FRRFC FSGXE FWDCC GGCAI GGRSB GJIRD GNWQR GQ6 GQ7 GQ8 GXS H13 HCIFZ HF~ HG5 HG6 HMJXF HQYDN HRMNR HVGLF HZ~ I09 IHE IJ- IKXTQ IWAJR IXC IXD IXE IZIGR IZQ I~X I~Z J-C J0Z JBSCW JCJTX JZLTJ KB. KDC KOV KOW LAS LLZTM M4Y M7S MA- N2Q N9A NB0 NDZJH NPVJJ NQJWS NU0 O9- O93 O9G O9I O9J OAM P19 P9P PDBOC PF0 PT4 PT5 PTHSS QOK QOS R4E R89 R9I RHV RIG RNI RNS ROL RPX RSV RZK S16 S1Z S26 S27 S28 S3B SAP SCLPG SCV SDH SDM SEG SHX SISQX SJYHP SNE SNPRN SNX SOHCF SOJ SPISZ SRMVM SSLCW STPWE SZN T13 T16 TSG TSK TSV TUC U2A UG4 UOJIU UTJUX UZXMN VC2 VFIZW W23 W48 WK8 YLTOR Z45 Z5O Z7R Z7S Z7V Z7W Z7X Z7Y Z7Z Z83 Z85 Z86 Z88 Z8M Z8N Z8P Z8Q Z8R Z8S Z8T Z8W Z8Z Z92 ZMTXR _50 ~EX |
ID | FETCH-hal_primary_oai_HAL_lirmm_01768858v13 |
ISSN | 0946-7076 |
IngestDate | Tue Oct 15 15:45:26 EDT 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 9 |
Language | English |
License | Distributed under a Creative Commons Attribution 4.0 International License: http://creativecommons.org/licenses/by/4.0 |
LinkModel | OpenURL |
MergedId | FETCHMERGED-hal_primary_oai_HAL_lirmm_01768858v13 |
ORCID | 0000-0003-2137-2623 |
ParticipantIDs | hal_primary_oai_HAL_lirmm_01768858v1 |
PublicationCentury | 2000 |
PublicationDate | 2017-09 |
PublicationDateYYYYMMDD | 2017-09-01 |
PublicationDate_xml | – month: 09 year: 2017 text: 2017-09 |
PublicationDecade | 2010 |
PublicationTitle | Microsystem Technologies |
PublicationYear | 2017 |
Publisher | Springer Verlag |
Publisher_xml | – name: Springer Verlag |
SSID | ssj0007983 |
Score | 4.101305 |
Snippet | The 2015 edition of the Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP) was held in Montpellier, France, 27–30 April 2015.... |
SourceID | hal |
SourceType | Open Access Repository |
SubjectTerms | Engineering Sciences Micro and nanotechnologies Microelectronics |
Subtitle | Montpellier, France, April 27–30, 2015 |
Title | Special issue on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP 2015) |
URI | https://hal-lirmm.ccsd.cnrs.fr/lirmm-01768858 |
Volume | 23 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnZ3PT8IwFMcbghc9-QPj7_TAQTNmBuu2ciQCGQq4RDDcFra10SjDEPDgX-9ru19ETNDLQgppun5KX_v6fa8IVU2bO5HB4P_NKdMJd5o6tSyum5E4xIEFLJfpiwdD2x2T-4k1KZX6BdXSahnchl8b40r-QxXKgKuIkv0D2axSKIDPwBeeQBiePxlvNDUDoadT2ZhzL3mmC0yCPdQV85rsYnE40JaqDUmKqZCPXpI0ItUme9PwLbm-iGuDDmz2pR7jsSO3_bQ96nka2HSr4EdQmlI5XNgijoreBLBQqVxq3ZuoFbyJibuQ2LpjOEnaajVZErOhg72nxdlURQ8no6a5cZJWugxx3zoRshCY5CwhwMgtUnoK77aefK_d9fu94cP6t1lmbLfV999fF7OZDxXZFBrzCXvhHXHhu5j1xo1WZpedpkrKmr5JesZtyJSy622BlcZL6lmXK43RPqrkMZjYy5AfoBKLD9FeIX3kEXpOyGLZDXgeY0W2hgXXGi5QxcAPZ1TxnGNBVZZKqvhaMMWC6U0Fad3O6M7VoW3-h8pG4v_WC-YxKsfzmJ0gTEOHmrAzYHU7IHUypUHIw0ZkOJyROmPkFFW3qfFsu5-do918ZF2g8nKxYpewclsGVxLIN65jQfk |
link.rule.ids | 230,310,311,783,787,792,793,888,23942,23943,25152,27937 |
linkProvider | Springer Nature |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=proceeding&rft.title=Microsystem+Technologies&rft.atitle=Special+issue+on+Design%2C+Test%2C+Integration+and+Packaging+of+MEMS+and+MOEMS+%28DTIP+2015%29&rft.au=Michel%2C+Bernd&rft.date=2017-09-01&rft.pub=Springer+Verlag&rft.issn=0946-7076&rft.eissn=1432-1858&rft.volume=23&rft.issue=9&rft_id=info:doi/10.1007%2Fs00542-017-3509-3&rft.externalDBID=HAS_PDF_LINK&rft.externalDocID=oai_HAL_lirmm_01768858v1 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0946-7076&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0946-7076&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0946-7076&client=summon |