Multi-level relief structures in solgel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
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| Published in | Applied surface science Vol. 254 |
|---|---|
| Main Authors | , , , , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier
2008
|
| Online Access | Get full text |
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| Author | Gérard, P. Fontaine, Julien Benatmane, A. Montgomery, P.C. Engel, T. Fort, A. Neiss, E. Mager, L. Rehspringer, J.L. Flury, M. |
|---|---|
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| Title | Multi-level relief structures in solgel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy |
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