The Evaluation of Interface Quality in HfO[sub.2] Films Probed by Time-Dependent Second-Harmonic Generation

• Published in: Materials Vol. 17; no. 14
• Main Authors: Zhang, Libo, Ye, Li, Zhao, Weiwei, Huang, Chongji, Liu, Xue, Gao, Wenshuai, Li, Tao, Min, Tai, Yang, Jinbo, Tian, Mingliang, Chen, Xuegang
• Format: Journal Article
• Language: English
• Published: MDPI AG 01.07.2024
• Subjects: Investigations; Metal oxide semiconductor field effect transistors

Time-dependent second-harmonic generation (TD-SHG) is an emerging sensitive and fast method to qualitatively evaluate the interface quality of the oxide/Si heterostructures, which is closely related to the interfacial electric field. Here, the TD-SHG is used to explore the interface quality of atomi...