Reduction in absorption in quartz/Si, quartz/Si/Si[O.sub.2], and SiC/Si/Si[O.sub.2] structures on laser treatment

The effect of laser radiation on the optical absorption spectra of the quartz/Si, quartz/Si/Si[O.sub.2], and SiC/Si/Si[O.sub.2] systems is studied. The effects of modification of the transparency of the structures are clarified. DOI: 10.1134/S1063782610030061

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Bibliographic Details
Published inSemiconductors (Woodbury, N.Y.) Vol. 44; no. 3; p. 309
Main Authors Lissotschenko, V.N, Konakova, R.V, Konoplev, B.G, Kushnir, V.V, Svetlichnyi, A.M
Format Journal Article
LanguageEnglish
Published Springer 01.03.2010
Subjects
Dielectric films
Nuclear radiation
Optical properties
Thin films
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Summary:The effect of laser radiation on the optical absorption spectra of the quartz/Si, quartz/Si/Si[O.sub.2], and SiC/Si/Si[O.sub.2] systems is studied. The effects of modification of the transparency of the structures are clarified. DOI: 10.1134/S1063782610030061
ISSN:1063-7826
DOI:10.1134/S1063782610030061