ARRANGEMENT, SYSTEM, AND METHOD FOR PROCESSING MULTILAYER BODIES

The device (30e) has a spacer element (70e) for accommodating multi-layer bodies i.e. lower- and/or upper substrates (40, 50). The device is formed for accommodating the bodies such that a processing chamber (11) is formed between surfaces of the bodies to be processed for processing i.e. selenizati...

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Main Authors FURFANGER MARTIN, PALM JORG, JOST STEFAN
Format Patent
LanguageEnglish
Published 25.09.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract The device (30e) has a spacer element (70e) for accommodating multi-layer bodies i.e. lower- and/or upper substrates (40, 50). The device is formed for accommodating the bodies such that a processing chamber (11) is formed between surfaces of the bodies to be processed for processing i.e. selenization, of the bodies as a multi-layer body arrangement (28d) in a processing system. Another spacer element accommodates the former spacer element such that the multi-layer body arrangement is formed. The latter spacer element is partially arranged below the lower multi-layer body. Independent claims are also included for the following: (1) a multi-layer body arrangement comprising a device for positioning two objects (2) a system for processing two objects (3) a method for positioning two objects.
AbstractList The device (30e) has a spacer element (70e) for accommodating multi-layer bodies i.e. lower- and/or upper substrates (40, 50). The device is formed for accommodating the bodies such that a processing chamber (11) is formed between surfaces of the bodies to be processed for processing i.e. selenization, of the bodies as a multi-layer body arrangement (28d) in a processing system. Another spacer element accommodates the former spacer element such that the multi-layer body arrangement is formed. The latter spacer element is partially arranged below the lower multi-layer body. Independent claims are also included for the following: (1) a multi-layer body arrangement comprising a device for positioning two objects (2) a system for processing two objects (3) a method for positioning two objects.
Author JOST STEFAN
FURFANGER MARTIN
PALM JORG
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Snippet The device (30e) has a spacer element (70e) for accommodating multi-layer bodies i.e. lower- and/or upper substrates (40, 50). The device is formed for...
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title ARRANGEMENT, SYSTEM, AND METHOD FOR PROCESSING MULTILAYER BODIES
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