PHOTODEFINEABLE COMPOSITIONS

• Main Authors: MOYER, ERIC, S, SCHECK, DANIEL, M, SO, YING HUNG, MURLICK, CHERYL, L, BECKER, GREGORY, S
• Format: Patent
• Language: English; French
• Published: 10.10.1996
• Edition: 6
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; COMPOSITIONS OF MACROMOLECULAR COMPOUNDS; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP

A photodefineable mixture comprising oligomeric divinyltetramethyldisiloxane bisbenzocyclobutene as its major resin component dissolved in mesitylene and at least 2,6-bis(4-azidobenzylidene)-4-ethylcyclohexanone as a photosensitive agent in an amount sufficient to convert the mixture to an organic-insoluble solid upon exposing the mixture to photon radiation is disclosed. These polymer compositions are useful as thin film dielectrics in electronic applications such as multichip modules, integrated circuits and printed circuit boards. Un mélange photo-définissable comprend du divinyltétraméthyldisiloxane bisbenzocyclobutène oligomère en guise de composant essentiel de la résine qui est dissous dans du mésitylène et au moins de la 2,6-bis(4-azidobenzylidène)-4-éthylcyclohexanone en guise d'agent photosensible, en une quantité suffisante pour transformer ce mélange en un solide insoluble dans des substances organiques lors de l'exposition dudit mélange à un rayonnement photonique. De telles compositions polymères servent de diélectriques à couches minces pour des utilisations en électronique telles que la fabrication de modules multi-circuits et de plaquettes de circuits intégrés ou imprimés.