COMPUTER-AIDED DESIGN METHODS AND APPARATUS FOR MULTILEVEL INTERCONNECT TECHNOLOGIES

• Main Authors: CHANG, KEH-JENG, OH, SOO-YOUNG, LEE, KEUNMYUNG, CHANG, NORMAN, H
• Format: Patent
• Language: English; French
• Published: 09.12.1993
• Edition: 5
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; SEMICONDUCTOR DEVICES

A computer-aided method of designing semiconductor interconnect structures for multilevel device interconnects in VLSI integrated circuits. The method integrates a batch-mode computation procedure (100) that combines a finite difference numerical simulation and a fast interpolation algorithm, an int...