GAS LASER DEVICE, METHOD FOR CONTROLLING TEMPERATURE OF LASER GAS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

• Main Authors: HATTORI, Masakazu, KAKIZAKI, Kouji, KUMAZAKI, Takahito
• Format: Patent
• Language: English; French; Japanese
• Published: 06.09.2024
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

This gas laser device that outputs pulsed laser light comprises a laser chamber that accommodates laser gas, a discharge electrode that is disposed within the laser chamber and excites the laser gas through discharge, an optical element that is disposed on the optical path of the pulsed laser light,...