OPTICAL ELEMENT WITH DISTANT LAYER
An optical element including a substrate (210), a light sensing device (220) disposed in the substrate (210); a first distant layer (230) disposed above the substrate (210), wherein a coefficient of thermal expansion of the first distant layer (230) is between 10 ppm/℃ and 300 ppm/℃, and wherein an...
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Main Authors | , |
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Format | Patent |
Language | English French |
Published |
25.04.2024
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Subjects | |
Online Access | Get full text |
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Summary: | An optical element including a substrate (210), a light sensing device (220) disposed in the substrate (210); a first distant layer (230) disposed above the substrate (210), wherein a coefficient of thermal expansion of the first distant layer (230) is between 10 ppm/℃ and 300 ppm/℃, and wherein an angle between a sidewall of the first distant layer (230) and a top surface of the substrate (210) is in a range of 10° to 60°; and an inorganic multilayer film (240) covering a top surface and the sidewall of the first distant layer (230), wherein a coefficient of thermal expansion of the inorganic multilayer film (240) is between 0.5 ppm/℃ and 30 ppm/℃.
La présente invention concerne un élément optique comprenant un substrat (210), un dispositif de détection de lumière (220) disposé dans le substrat (210); une première couche distante (230) disposée au-dessus du substrat (210), un coefficient de dilatation thermique de la première couche distante (230) étant compris entre 10 ppm/°C et 300 ppm/°C, et un angle entre une paroi latérale de la première couche distante (230) et une surface supérieure du substrat (210) étant compris entre 10° et 60°; et un film multicouche inorganique (240) recouvrant une surface supérieure et la paroi latérale de la première couche distante (230), un coefficient de dilatation thermique du film multicouche inorganique (240) étant compris entre 0,5 ppm/°C et 30 ppm/°C. |
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Bibliography: | Application Number: WO2022CN126413 |