ION FUNNELS HAVING IMPROVED PRESSURE DISTRIBUTION AND FLOW CHARACTERISTICS

• Main Authors: BUTTRILL, Sidney, KRIOUTCHKOV, Serguei, ROEHR, Nathan, DENG, Liulin, LEVINE, Myles, DEBORD, John Daniel
• Format: Patent
• Language: English; French
• Published: 18.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The present disclosure is directed to an ion funnel and associated systems, where the ion funnel includes a plurality of electrodes each define an opening having an associated inner dimension and receive a RF voltage. The associated inner dimensions progressively reduce in size from approximately a...