METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING
Systems and methods are disclosed that address the problem of large-scale optical manufacturing of microstructures. The systems and methods utilize one or more optical processing systems to generate a first set of alignment marks in a first region on a surface. The optical processing systems then mo...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French |
Published |
05.01.2023
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Subjects | |
Online Access | Get full text |
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