REAGENT CARTRIDGE FOR SUBLIMATION AND REACTOR APPARATUS
A reagent cartridge (1000) for sublimation of a solid reagent (1001) and a reactor apparatus are disclosed. The reagent cartridge (1000) comprises a reagent chamber (1200) for holding the solid reagent (1001) and at least one pressure sensor (1100) for measuring pressure inside the reagent cartridge...
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Main Authors | , , |
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Format | Patent |
Language | English French |
Published |
07.12.2023
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Subjects | |
Online Access | Get full text |
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