PIEZOELECTRIC DEVICE

A piezoelectric device (101) comprises: a base part (10) having an opening (9); and a vibration layer (12) disposed on the upper side of the base part (10). The vibration layer (12) has a fixation part (41) fixed to the base part (10) and a membrane part (42) which is contiguous to the fixation part...

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Bibliographic Details
Main Authors SAWAMURA, Makoto, IKEUCHI, Shinsuke, NIWA, Ryosuke
Format Patent
LanguageEnglish
French
Japanese
Published 27.07.2023
Subjects
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