PIEZOELECTRIC DEVICE
A piezoelectric device (101) comprises: a base part (10) having an opening (9); and a vibration layer (12) disposed on the upper side of the base part (10). The vibration layer (12) has a fixation part (41) fixed to the base part (10) and a membrane part (42) which is contiguous to the fixation part...
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Main Authors | , , |
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Format | Patent |
Language | English French Japanese |
Published |
27.07.2023
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Subjects | |
Online Access | Get full text |
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