ADJUSTABLE PROBE FOR PLASMA DIAGNOSTICS

• Main Authors: CHOUDHURY, Ayan, HARRIS, Paul, TOCHON, Pierre
• Format: Patent
• Language: English; French
• Published: 18.08.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; TESTING

An adjustable probe for plasma diagnostics is disclosed that includes a probe body extending along a probe axis, and a probe head adjustably coupled to the probe body and having a probing surface configured to contact a plasma in a plasma chamber. The probe head is configured for adjustable position...