JOINED BODY AND ELECTROSTATIC CHUCK
This joined body comprises a plate-form first member, a flat plate-form second member, and a joining part that is positioned between the first and second members and that joins the first and second members, wherein the joining part is provided with: a first joining layer that is formed from a first...
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Main Authors | , , |
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Format | Patent |
Language | English French Japanese |
Published |
30.12.2021
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Subjects | |
Online Access | Get full text |
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